振动特征逻辑空间分组下的微凸点可靠性检测
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1.无锡职业技术大学机械工程学院无锡214121;2.江南大学智能制造学院无锡214122

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TH89

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国家自然科学基金项目(U23B2044, 52375099)、国家重点研发项目(2023YFB4404200)资助


Reliability detection of microbumps based on vibration feature logic space grouping
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1.School of Mechanical Engineering, Wuxi University of Technology, Wuxi 214121, China; 2.School of Intelligent Manufacturing, Jiangnan University, Wuxi 214122, China

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    摘要:

    倒装芯片微凸点振动信号存在微尺度特征、检测信号强干扰及多模式成分混淆等问题,导致缺陷特征映射关系复杂、缺陷识别率显著降低,严重制约缺陷识别精度与工业实用性,成为微纳电子制造缺陷检测领域亟待解决的关键瓶颈。为此,针对现有知识蒸馏方法未充分挖掘逻辑知识、类间关系利用薄弱,难以实现细粒度缺陷精准识别等问题,提出特征逻辑空间分组蒸馏(feature logic space grouping distillation, FLSGD)算法。该算法围绕知识传递逻辑解析显性与隐性知识,将交互信息投影至三概率空间,即目标空间t、类内空间o\t及类外空间c\o,解耦传统Kullback-Leibler(KL)散度实现逻辑特征定向学习;采用主客观权重法量化三空间权重,确定参数指导值,灵活调控知识传递侧重。为验证算法有效性,实验基于PCB基板与硅基芯片两组超声振动数据集,搭建单/双源超声激励检测平台开展验证,论证了FLSGD中目标空间起主导作用,类内、类外空间起辅助作用。实验结果表明,FLSGD在多种教师-学生网络组合中,识别精度优于主流特征蒸馏方法,在两组数据集下的最高精度分别达到96.47%与97.69%。FLSGD能够在未增加计算模块与算力消耗的基础上有效挖掘振动信号模态特性,增强关键特征感知,提高缺陷识别精度,加速模型收敛,为工业端轻量级缺陷检测提供有效方案。

    Abstract:

    Flip-chip microbump vibration signals are characterized by microscale features, strong interference in acquired signals, and severe confusion of multi-modal components, which give rise to complicated mapping relationships of defect features and a remarkable drop in defect recognition accuracy. It severely restricts the accuracy of defect identification and industrial applicability, becoming a key bottleneck that urgently needs to be addressed in the field of micro-nano electronic manufacturing defect detection. To tackle the deficiencies of existing knowledge distillation, including insufficient exploitation of logical knowledge, weak utilization of inter-class relationships, and limited capacity to achieve accurate defect identification, this article proposes a feature logic space grouping distillation (FLSGD) algorithm. This algorithm analyzes explicit and implicit knowledge around the logic of knowledge transfer, and projects interactive information into three probability spaces, namely target space t, intra-class space o\t and outer-class space c\o. It decouples the traditional Kullback-Leibler (KL) divergence to realize directed learning of logical features. The subjective and objective weighting method is adopted to quantify the weights of the three spaces and determine the parameter guidance values, so as to flexibly regulate the focus of knowledge transfer. To verify the effectiveness of the proposed algorithm, experiments are conducted on two ultrasonic vibration datasets derived from PCB substrate chip and silicon-based dummy chips. A single/dual-source ultrasonic excitation detection platform is established for validation, which verifies that the target space plays a dominant role in FLSGD, while the intra-class and outer-class spaces serve auxiliary functions. Experimental results demonstrate that FLSGD outperforms mainstream feature distillation methods in terms of recognition accuracy across various teacher-student network combinations, achieving a maximum accuracy of 96.47% and 97.69% on the two datasets, respectively. FLSGD can effectively exploit the modal characteristics of vibration signals, enhance the perception of key features, improve defect recognition accuracy and accelerate model convergence speed without introducing additional computational modules or increasing computing power consumption, thus providing an effective solution for lightweight defect detection in industrial applications.

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孙钰,宿磊,李可,曹澍,彭广盼.振动特征逻辑空间分组下的微凸点可靠性检测[J].仪器仪表学报,2026,47(5):246-258

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  • 在线发布日期: 2026-07-24
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